FIZIKA A 9 (2000) 2 , 87-94

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OXYGEN REFLEX PLASMA DIAGNOSTICS

EMIL BARNA, VANIA COVLEA, HORIA ANDREI and EMIL I. TOADER

Faculty of Physics, The Bucharest University, P.O. Box MG-11,
76900 Bucharest-Magurele, Romania

Received 4 January 2000; Accepted 4 May 2000

An oxygen reflex discharge was investigated. The voltage-current characteristics of the discharge have been measured at pressures between 6.6510-2 Pa and 13.3 Pa (510-4 to 10-1 torr). Other discharge parameters, i.e. electron temperature and plasma concentration, were determined for three different discharge currents using Langmuir electrostatic-probe technique. A sheath theoretical model gave us another set of results for plasma concentration which confirmed the results obtained by the probe technique. Concentrations obtained (about 1017 m-3) are very high, comparable to those in RF reactors, so the reflex plasma can be used for technological purposes.

PACS numbers: 52.80.Sm, 52.55.Dy
UDC 537.525
Keywords: oxygen reflex discharge, voltage-current characteristics, electron temperature, plasma concentration, sheath theoretical model
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